首先阐述了微电子机械系统 (MEMS)技术的基本概念、特点及概况 ;其次 ,介绍了MEMS技术的分类及在各领域的应用产品 ;最后 ,重点介绍了RFMEMS技术 ,包括某些RFMEMS器件的典型结构及性能指标

First, this paper describes the basic idea, characteristic and situation for the micro-electro-mechanical systems (MEMS) technology, then the application products in all kinds of fields are introduced. Finally, RF MEMS technology is mainly presented, including classes, type structures and performance of some devices.

TN957.8