该文采用至上而下的方式,介绍了应用RF MEMS技术的雷达系统,将雷达子系统与RF MEMS技术联系起来,具体 分析了应用于雷达的RF MEMS开关、移相器、滤波器和谐振器。同时,文中以开关和移相器为例,讨论了如何提高RF MEMS雷达的性能:修改空气桥形状可以提高RF MEMS收发(T/R)组件的功率处理能力,从而减少雷达相控阵的T/R组 件数量;缩短转换时间的RF MEMS移相器能够应用于高速电扫描阵列;蜿蜒型5位分布式MEMS传输线移相器面积仅为 5.36 mm×4.72 mm,相比传统移相器长度降低70% ,易于实现雷达阵列的小型化。

Using a bottom-up approach, radar systems which benefit from RF MEMS technology is introduced. Radar subsystems are related to RF MEMS technology by analysis of RF MEMS switch, phase shifter, filter and resonator. The paper also discusses how to inprove radar performance by designing the switch and phase shifter as examples. The T/ R module composed of the RF MEMS switch without self-actuation can handle much higher RF power and reduces the number of transmitter and receiver (T/R) modules in electronically dcanned srray (SEA) radar. A RF MEMS phase shifter with short release time is suitable for high speed SEA. A novel 5-bit distributed MEMS phase shifter using meander structure has an area of 5.36 mm×4.72 mm witch is suitable for small radar. Compared to conventional 5-bit distributed phase shifter, the length of advanced phase shifter is decreased by 70%.

国家部委基金;中国工程物 理研究院科学技术发展基金;国家 自然科学基金委员会;中国工程物理研究院联合基 金)资助项目