文中对微系统技术在雷达领域的应用前景进行了分析,并对国外最新发展现状进行了总结和评估。微系统技术范畴非常广,包含微电子、光电子、微机电等多个方面。微电子技术方面,片上系统和芯片级组件等技术极大提高了天线的集成度;微加工技术可实现系统级封装,将可以在一个或几个晶片上实现一部高频段有源相控阵天线;光电子可提高雷达系统带宽、隔离度,极大提升后端处理能力,将光子技术与互补金属氧化物半导体工艺相结合是实现低成本的有效途径。对更小体积、更低成本、更高性能的追求是雷达领域永恒的主题,微系统与雷达的结合是必然趋势。

The paper makes a deep analysis of application aspect of micro-system technology ( MST) in radar system and a summary and evaluation of present oversea research status. Three key areas of MST technology are microelectronics, photonics and micro-electro-mechanical system( MEMS) . From the aspect of microelectronics, system on chip and T/ R chip are effective ways to achieve higher density of antenna integration. The application of micromachining can achieve system on chip. We can even sculpture a millimeter active electronically scanned array antenna on one or several wafers based on MEMS manufacturing process. The application of photonics technology can achieve wider operation bandwidth, higher isolation and much more higher processing capability, delivering photonic solutions manufactured in a mainstream complementary metal-oxide-semicorcluctor transistor fabrication is the promising way to achieve low cost. For radar research, the pursuit of smaller size, affordability and higher capability is eternal. The convergence of MST and radar can confront the challenge effectively.

TP332